Journal of the Korean Society for Precision Engineering (한국정밀공학회지)

Korean Society for Precision Engineering (한국정밀공학회)
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Design and Evaluation of a Rotation Table using Air Bearings for Electron Beam Mastering

전자빔 마스터링을 위한 공기베어링 응용 고진공 회전테이블의 설계 및 진공특성 평가

  • Khim, Gyung-Ho (Intelligent Manufacturing Systems Research Division, KIMM) ;
  • Song, Chang-Kyu (Intelligent Manufacturing Systems Research Division, KIMM) ;
  • Park, Chun-Hong (Intelligent Manufacturing Systems Research Division, KIMM)
  • 김경호 (한국기계연구원 지능형생산시스템연구본부) ;
  • 송창규 (한국기계연구원 지능형생산시스템연구본부) ;
  • 박천홍 (한국기계연구원 지능형생산시스템연구본부)
  • Published : 2008.12.01
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Abstract

Recently, mastering processes for high density optical disc such as Blu-ray disc rely on electron beams, which are operable in only vacuum. In the mastering process, one of the most important tasks is to design precision stages for providing precise positioning of the works with respect to the source in a high vacuum environment. In this paper, we have developed a precision rotation table usable in the electron beam mastering. The rotation table adopted air bearings for a high positioning repeatability and velocity stability. The air leakage from the air bearings has been minimized by employing the differential exhaust scheme using three steps of air drain. The design parameters such as diameters of exhaust lines, seal lengths, and pumping speeds were decided according to the optimization method using genetic algorithm. The performance on the vacuum level of the rotation table was evaluated experimentally and theoretically. The results indicate that a vacuum level of $10^{-4}$ Pa is achieved with operation of air bearings in a vacuum chamber, which is sufficient for the electron beam mastering.

Keywords

References

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