International Journal of Precision Engineering and Manufacturing

Korean Society for Precision Engineering (한국정밀공학회)
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A Nano-particle Deposition System for Ceramic and Metal Coating at Room Temperature and Low Vacuum Conditions

  • Chun, Doo-Man (School of Mechanical and Aerospace Engineering, Seoul National University) ;
  • Kim, Min-Hyeng (School of Mechanical and Aerospace Engineering, Seoul National University) ;
  • Lee, Jae-Chul (School of Mechanical and Aerospace Engineering, Seoul National University) ;
  • Ahn, Sung-Hoon (School of Mechanical and Aerospace Engineering, Seoul National University)
  • Published : 2008.01.01
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Abstract

A new nano-particle deposition system (NPDS) was developed for a ceramic and metal coating process. Nano- and micro-sized powders were sprayed through a supersonic nozzle at room temperature and low vacuum conditions to create ceramic and metal thin films on metal and polymer substrates without thermal damage. Ceramic titanium dioxide ($TiO_2$) powder was deposited on polyethylene terephthalate substrates and metal tin (Sn) powder was deposited on SUS substrates. Deposition images were obtained and the resulting chemical composition was measured using X-ray photoelectron spectroscopy. The test results demonstrated that the new NPDS provides a noble coating method for ceramic and metal materials.

Keywords

References

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