Journal of the Korean Vacuum Society (한국진공학회지)

The Korean Vacuum Society (한국진공학회)
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Electrical and optical properties of Ag/ZnO multilayer thin film by the FTS

FTS법으로 제작한 Ag/ZnO 박막의 전기적, 광학적 특성

  • Rim, Y.S. (Department of Electrical engineering, Kyungwon University) ;
  • Kim, S.M. (Department of Electrical engineering, Kyungwon University) ;
  • Son, I.H. (Department of Digital Electrical engineering, Shinsung College) ;
  • Lee, W.J. (Department of Electronic engineering, Kyungwon University) ;
  • Choi, M.K. (Department of Electrical engineering, Kyungwon University) ;
  • Kim, K.H. (Department of Electrical engineering, Kyungwon University)
  • 임유승 (경원대학교 전기공학과) ;
  • 김상모 (경원대학교 전기공학과) ;
  • 손인환 (신성대학 디지털전기계열) ;
  • 이원재 (경원대학교 전자공학과) ;
  • 최명규 (경원대학교 전기공학과) ;
  • 김경환 (경원대학교 전기공학과)
  • Published : 2008.03.30
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Abstract

We have studied the properties of Ag/undoped ZnO (ZnO) multilayer thin films deposited on glass substrate by the facing targets sputtering method. In an attempt to find out the optimum conditions of the Ag thin film, which would be coated on the ZnO thin film, we investigated the changes of sheet resistance, transmittance and surface morphology as a function of deposition times and the substrate temperature. The electrical and optical characteristics of Ag/ZnO multilayers were evaluated by a four-point probe, a UV/VIS spectrometer with a spectral range of 390-770 nm, a X-ray Diffractometer (XRD), an atomic force microscope (AFM) and a Field Emission Scanning Electron Microscope (SEM), respectively. We were able to prepare the Ag/ZnO multilayer thin film with sheet resistance of 9.25 $\Omega/sq.$ and transmittance of over 80% at 550nm.

대향 타겟식 스퍼터링법 (Facing Targets Sputtering)을 이용하여 유리기판위에 증착한 Ag/ZnO 다층 박막의 특성을 연구하였다. Ag 박막의 높은 전도도와 투과율을 나타내는 공정조건을 찾기 위하여, 증착시간, 기판온도 변화에 따른 Ag박막의 특성을 살펴보았으며, ZnO 박막의 두께 변화에 따른 Ag/ZnO 다층박막의 특성을 살펴보았다, 10초간 증착한 Ag 박막은 연속된 막구조를 가지지 못하여, 30초간 증착된 막에 비해 전기적, 광학적 특성이 저하되는 것을 확인할 수 있었다. ZnO 박막의 AFM 측정 결과 박막의 거칠기(Rrms) 값의 변화에 따라 Ag/ZnO박막의 특성에 영향을 미쳤으며, 거칠지 않은 표면을 지닌 박막에서 Ag 박막 증착 시 좋은 특성을 나타냈다. 제작된 박막은 four point probe, UV/VIS spectrometer, AFM을 사용하여 전기적, 광학적, 구조적 특성을 조사하였다. 제작결과 Ag/ZnO 다층박막의 면저항은 9.25 $[\Omega/sq.]$을 나타내었으며, 가시광영역에서 광투과율은 80%이상을 나타내었다.

Keywords

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