Journal of the Korean Institute of Electrical and Electronic Material Engineers (한국전기전자재료학회논문지)

The Korean Institute of Electrical and Electronic Material Engineers (한국전기전자재료학회)
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Ga doped ZnO Thin Films for Gas Sensor Application

Ga이 첨가된 ZnO 박막의 가스센서로의 응용 연구

  • 황현석 (요업기술원 융합기술본부) ;
  • 여동훈 (요업기술원 융합기술본부) ;
  • 김종희 (요업기술원 융합기술본부) ;
  • 송준태 (성균관대학교 정보통신공학부)
  • Published : 2008.06.01
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Abstract

In this work, Ga-doped ZnO (GZO) thin films for gas sensor application were deposited on low temperature co-fired ceramics (LTCC) substrates, by RF magnetron sputtering method. The LTCC substrate is one of promising materials for this application since it has many advantages (e.g., low cost production, high manufacturing yields and easy realizing 3D structure etc.). The LTCC substrates with thickness of $400\;{\mu}m$ were fabricated by laminating 12 green tapes which consist of alumina and glass particle in an organic binder. The structural properties of the fabricated GZO thin film with thickness of 50 nm is analyzed by X-ray diffraction method (XRD) and field emission scanning electron microscope (FESEM). The film shows good adhesion to the substrate. The GZO gas sensors are tested by gas measurement system and show fast response and recovery characteristics to $NO_x$ gas that is 27.2 and 27.9 sec, recpectively.

Keywords

References

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