Journal of the Korean Institute of Plant Engineering (대한설비관리학회지)

The Korean Institute of Plant Engineering (대한설비관리학회)
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Effective Operation of SPC System in Semiconductor Manufacturing

반도체 제조공정의 효과적인 SPC시스템 운용

Cha, Myung-Seon;Jang, Joong-Soon
차명선;장중순

  • Published : 20091200

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Abstract

This paper is to find effective SPC operation in semiconductor companies. we proposed SPC system framework and suitable control chart based on process date characteristics in semiconductor manufacturing process. Monitoring of process input parameters is more important than monitoring of process output parameters in semiconductor SPC system. Also, suitable control charts of thickness of GOX process considered variation factors, and particle control charts reflected its data characteristics. This study also shows feasibility of suitable control charts through a case study of semiconductor companies.

Keywords

References

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