Journal of the Korean institute of surface engineering (한국표면공학회지)

The Korean Institute of Surface Engineering (한국표면공학회)
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A Study on Adhesion and Electro-optical Properties of ITO Films Deposited on Flexible PET Substrates with Deposition of SiO2 Buffer Layers

PET 기판 위에 SiO2 버퍼층 증착에 따른 ITO 박막의 부착 및 전기적 광학적 특성 연구

  • Kang, Ja-Youn (Department of Advanced Materials Engineering, Kyonggi University) ;
  • Kim, Dong-Won (Department of Advanced Materials Engineering, Kyonggi University) ;
  • Cho, Kyu-Il (Department of Advanced Materials Engineering, Kyonggi University) ;
  • Woo, Byung-Il (Department of Advanced Materials Engineering, Kyonggi University) ;
  • Yun, Hwan-Jun (Samhan Electronics)
  • 강자연 (경기대학교 재료공학과) ;
  • 김동원 (경기대학교 재료공학과) ;
  • 조규일 (경기대학교 재료공학과) ;
  • 우병일 (경기대학교 재료공학과) ;
  • 윤환준 ((주)삼한일렉트로닉스)
  • Published : 2009.02.28
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Abstract

Using an evaporation system, $SiO_2$ was deposited as a buffer layer between a PET substrate and a ITO layer and then ITO/$SiO_2$/PET layers were annealed for 1.5 hours at the temperature of $180^{\circ}C$. Adhesion and electro-optical properties of ITO films were studied with thickness variance of a $SiO_2$ buffer layer. As a result of introduction of the $SiO_2$ buffer layer, sheet resistance and resistivity increased and a ITO film with optimum sheet resistance ($529.3{\Omega}/square$) for an upper ITO film of resistive type touch panel could be obtained when $SiO_2$ of $50{\AA}$ was deposited. And it was found that ITO films with $SiO_2$ buffer layer have higher transmittance of $88{\sim}90%$ at 550 nm wavelength than ITO films with no buffer layers and the transmittance was enhanced as $SiO_2$ thickness increased from $50{\AA}$ to $100{\AA}$. Adhesion property of ITO films with $SiO_2$ buffer layers became better than ITO films with no buffer layers and this property was independent of $SiO_2$ thickness variance ($50{\sim}100{\AA}$). By depositing a $SiO_2$ buffer layer of $50{\AA}$ on the PET substrate and sputtering a ITO thin film on the layer, a ITO film with enhanced adhesion, electro-optical properties could be obtained.

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References

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