한국생산제조학회지 (Journal of the Korean Society of Manufacturing Technology Engineers)

  • 제18권6호
  • /
  • Pages.697-701
  • /
  • 2009
  • /
  • 2508-5093(pISSN)
  • /
  • 2508-5107(eISSN)
한국생산제조학회 (The Korean Society of Manufacturing Technology Engineers)
권호 표지

양극산화공정을 이용한 반사방지 성형용 나노 마스터 개발

Fabrication of Nano Master with Anti-reflective Surface Using Aluminum Anodizing Process

  • 신홍규 (강원대학교 기계메카트로닉스공학과) ;
  • 박용민 (강원대학교 기계메카트로닉스공학과) ;
  • 서영호 (강원대학교 기계메카트로닉스공학부) ;
  • 김병희 (강원대학교 기계메카트로닉스공학부)
  • 발행 : 2009.12.15
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초록

A simple method for the fabrication of porous nano-master for the anti-reflection effect on the transparent substrates is presented. In the conventional fabrication methods for antireflective surface, coating method using materials with low refractive index has usually been used. However, it is required to have a high cost and long processing time for mass production. In this paper, we developed a porous nano-master with anti-reflective surface for the molding stamper of the injection mold, hot embossing and UV imprinting by using the aluminum anodizing process. Through two-step anodizing and etching processes, a porous nano-master with anti-reflective surface was fabricated at the large area. Pattern size Pore diameter and inter-pore distance are about 130nm and 200nm, respectively. In order to replicate anti-reflective structure, hot embossing process was performed by varying the processing parameters such as temperature, pressure and embossing time etc. Finally, antireflective surface can be successfully obtained after etching process to remove selectively silicon layer of AAO master.

키워드

참고문헌

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