Journal of the Korean Physical Society

Korean Physical Society (한국물리학회)
권호 표지

Interdiffusion Region in a Tungsten-Carbon Multilayer Coating of Small d-Spacing

Chon, Kwon-Su;Juhng, Seon-Kwan;Yoon, Kwon-Ha

  • Published : 20090100
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Abstract

We established an ion-beam sputtering deposition system to deposit tungsten-carbon (W/C) multilayer coatings of small d-spacing and examined the layer structure of the W/C multilayer coatings by using a transmission electron microscope and an X-ray reflectometer. The tungsten thickness of the W/C multilayer coating was an important factor in determining the layer structure. When the ratio of the tungsten thickness to the interfacial roughness of the carbon layer in a multilayer coating was less than approximately 10 and the interfacial roughness was less than the interdiffusion thickness, the interdiffusion region of the W-on-C interface was simulated with a new tungsten-carbide layer.

Keywords

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