Current Applied Physics

Korean Physical Society (한국물리학회)
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Structural, electrical and optical properties of sol–gel AZO thin films

Lee, Ka-Eun;Wang, Ming-Song;Kim, Eui-Jung;Hahn, Sung-Hong

  • Published : 20090500
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Abstract

Transparent conductive Al-doped zinc oxide (AZO) thin films were prepared by a sol-gel method and their structural, electrical and optical properties were systematically investigated. A minimum resistivity of 4.2 ${\times}$ $10^{-3}$ $\Omega$ cm was obtained for the 650 $^{\circ}C$-annealed films doped with 1.0 at.% Al. All films had the preferential c-axis oriented texture according to the X-ray diffraction (XRD) results. Optical transmittance spectra of the films showed a high transmittance of over 85% in the visible region and the optical band gap of the AZO films broadened with increasing doping concentration.

Keywords

References

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