한국표면공학회지 (Journal of the Korean institute of surface engineering)

  • 제42권2호
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  • Pages.59-62
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  • 2009
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  • 1225-8024(pISSN)
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  • 2288-8403(eISSN)
한국표면공학회 (The Korean Institute of Surface Engineering)
권호 표지
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나노임프린트 리소그래피와 유연 PVA 템플릿을 이용한 렌즈 표면 moth-eye 패턴 형성에 관한 연구

Fabrication of Moth-Eye Pattern on a Lens Using Nano Imprint Lithography and PVA Template

  • 배병주 (고려대학교 신소재공학과) ;
  • 홍성훈 (고려대학교 신소재공학과) ;
  • 곽신웅 (코닉시스템) ;
  • 이헌 (고려대학교 신소재공학과)
  • Bae, B.J. (Department of Materials Science and Engineering, Korea University) ;
  • Hong, S.H. (Department of Materials Science and Engineering, Korea University) ;
  • Kwak, S.U. (RND Center, Kornic System Co) ;
  • Lee, H. (Department of Materials Science and Engineering, Korea University)
  • 발행 : 2009.04.30
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초록

Antireflection pattern, moth-eye structure, was fabricated on lens using Ultra Violet nanoimprint lithography and flexible template. Ni template with conical shaped structure was used as a master template to molding. The flexible poly vinyl alcohol template was fabricated by molding. This poly vinyl alcohol template was used as an imprint template of imprint at lens. Using Ultra Violet nanoimprint lithography and poly vinyl alcohol template, polymer based moth-eye structure was formed on lens and its transmittance was increased up to 94% from 92% at 550 nm wavelength.

키워드

참고문헌

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피인용 문헌

  1. Effect of Atomic Layer Deposited Al2O3 Thin Films on the Mechanical Properties of Anti-reflective Moth Eye Nanostructured Films vol.48, pp.2, 2015, https://doi.org/10.5695/JKISE.2015.48.2.50
  2. Viscoelastic Finite Element Analysis of Filling Process on the Moth-Eye Pattern vol.15, pp.4, 2014, https://doi.org/10.5762/KAIS.2014.15.4.1838
  3. Effects of Demolding Temperature on Formability and Optical Properties of Anti-reflective Nanostructure vol.23, pp.2, 2016, https://doi.org/10.6117/kmeps.2016.23.2.091
  4. Fabrication of Multiscale-Structure Wafer-Level Microlens Array Mold vol.9, pp.3, 2019, https://doi.org/10.3390/app9030487