Journal of the Korean Society of Manufacturing Technology Engineers (한국생산제조학회지)

The Korean Society of Manufacturing Technology Engineers (한국생산제조학회)
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Analysis of Nano-contact Between Nano-asperities Using Atomic Force Microscopy

나노스케일 표면돌기 간의 미세접촉에 대한 해석

  • 안효석 (서울산업대학교 NID융합기술대학원 나노IT융합프로그램) ;
  • 장동영 (서울산업대학교 산업정보시스템공학과)
  • Published : 2009.08.15
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Abstract

In micro/nano-scale contacts in MEMS and NEMS, capillary and van der Waals forces generated around contacting micro-asperities significantly influence the performance of concerning device as they are closely related to adhesion and stiction of interacting surfaces. In this regard, it is of prime importance to accurately estimate the magnitude of surface forces so that an optimal solution for reducing friction and adhesion of micro/nano-surfaces may be obtained We introduced an effective method to calculate these surface forces based on topography information obtained from an atomic force microscope. This method was used to calculate surface forces generated in the contact interface formed between diamond-like carbon coating and $Si_3N_4$ ball. This method is shown to effectively demonstrate the influence of capillary force in the contact area, especially in humid atmosphere.

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References

  1. Sulouff, R. E. 1998, "MEMS Opportunities in Accelerometers and Gyros and the Microtribology Problems Limiting Commercialization," Tribology Issues and Opportunities in MEMS, Ed. Bhushan, B., Kluwer Academic Publishers, pp. 109-120.
  2. Miller, S. L., Rodgers, M. S., Vigue, G. La, Sniegowski, J. J., Clews, P., Tanner, D. M., and Peterson, K. A, 1999, "Failure Modes in Surface Micromachined Micro- Eletromechanical Actuation System," Micro-electronics Reliability, Vol. 39, pp. 1229-1237.
  3. Tanner, D. M., 2000, "Reliability of Surface Micromachined Microeletro Mechanical Actuators," 22nd Int. Conf. in Microeletronics, pp. 97-104.
  4. Adamson, A. W., 1990, Physical Chemistry of Surfaces, 5th ed,. Wiley, New York.
  5. Israelachvili, J. N., 1991, Intermolecular and Surface Forces, 2nd ed., Academic press, London.
  6. Johnson, K. L., Kendall, K., and Roberts, A.D., 1971, "Surface Energy and the Contact of Elastic Solids," Proc. R. Soc. Lond. A, Vol. 324, pp. 301-313.
  7. Derjaguin, B. V., Muller, V. M., and Toporov, Y. P., 1975, "Effect of Contact Deformations on the Adhesion of Particles," J. of Colloid and Interface Science, Vol. 53, pp. 314-326.
  8. Kim, D. I. and Ahn, H. S., 2002, "Analysis of Surface Forces in Micro Contacts Between Rough Surfaces," Transactions of the KSME A, Vol. 26, No. 10, pp. 2180-2186.
  9. Podra, P. and Andersson, S., 1997, "Wear Simulation with the Winkler Surface Model," Wear, Vol. 207, pp. 79-85.
  10. Chizhik, S. A, Gorbunov, V. V., and Myshkin, N. K., 1995, "Analysis of Molecular Scale Roughness Effect on Contact of Solids based on Computer Modeling," Precision Engineering, Vol. 17, pp. 186-191.