Journal of the Korean Society for Precision Engineering (한국정밀공학회지)

Korean Society for Precision Engineering (한국정밀공학회)
권호 표지

Analysis of Fluid Flow in the Linear Cell Source for Organic Semiconductor Thin Film Deposition

유기반도체 박막증착을 위한 선형증착원의 유체유동해석

  • Kwak, In-Chul (Department of Mechanical Engineering, Chonnam National University) ;
  • Yang, Young-Soo (Department of Mechanical Engineering, Chonnam National University) ;
  • Choi, Bum-Ho (National Center for Nanoprocess and Equipments, Honam Technology Service Division, Korea Institute of Industrial Technology) ;
  • Kim, Young-Mi (National Center for Nanoprocess and Equipments, Honam Technology Service Division, Korea Institute of Industrial Technology)
  • 곽인철 (전남대학교 기계공학과) ;
  • 양영수 (전남대학교 기계공학과) ;
  • 최범호 (생산기술연구원 호남기술지원본부 나노기술집적센터) ;
  • 김영미 (생산기술연구원 호남기술지원본부 나노기술집적센터)
  • Published : 2009.10.01
Download PDF
⟨ Previous Next ⟩

Abstract

This paper presents a study on fluid flow analysis of organic semiconductor thin film deposition process using the computational numerical method. In the production process, the thickness of deposited organic thin film depends on distribution of nozzle size in the linear cell system, so we analyze to decide the optimal nozzle system for uniform thickness of organic thin film. The results of deposited thickness of thin film by numerical analysis are in good agreement with those of the experimental measurements.

Keywords

References

  1. Sirringhaus, H., Kawase, T., Friend, R. H., Shimoda, T., Inbasekaran, M., Wu, W. and Woo, E. P., "High-Resolution Inkjet Printing of All-Polymer Transistor Circuits," Science, Vol. 290, No. 5499, pp. 2123-2126, 2000 https://doi.org/10.1126/science.290.5499.2123
  2. Kim, Y. H., Park, S. K., Han, J. I., Moon, D. G. and Kim, W. K., "Solution-based Polymer TFT LCD on Plastic Substrates," SID Symposium Digest of Technical Papers, Vol. 34, No. 1, pp. 996-999, 2003 https://doi.org/10.1889/1.1832453
  3. Lin, Y.-Y., Gundlach, D. J., Nelson, S. F. and Jackson, T. N., "Stacked pentacene layer organic thin-film transistors with improved characteristics," IEEE Electron Device Letters, Vol. 18, No. 12, pp. 606-608, 1997 https://doi.org/10.1109/55.644085
  4. Yan, H., Kagata, T. and Okuzaki, H., "Ambipolar pentacene/C60-based field-effect transistors with high hole and electron mobilities in ambient atmosphere," Appl. Phys. Lett., Vol. 94, No. 2, Paper No. 023305, 2009 https://doi.org/10.1063/1.3072608
  5. Bao, Z. and Locklin, J., "Organic Field-Effect Transistors," CRC Press, pp. 489-594, 2007
  6. Versteeg, H. K. and Malalasekerra, W., "An introduction to computational fluid dynamics," Longman Group Ltd., pp. 142-146, 1995
  7. An, I. S., "Vacuum physics and technology," Hanyang University Press, pp. 35-51, 2003
  8. Cengel, Y. A. and Cimbala, J. M., "Fluid Mechanics," McGraw Hill, pp. 426-431, 2006
  9. Incropera, F. P. and Dewitt, D. P., "Introduction to heat transfer 3rd edition," John Wiley & Sons, pp. 50-59, 1998
  10. Cengel, Y. A. and Boles, M. A., "Thermodynamics 4th edition," McGraw Hill, p. 821, 2002