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Reaction Bonded Si3N4 from Si-Polysilazane Mixture

규소 고분자 복합체를 이용한 반응소결 질화규소

  • Hong, Sung-Jin (School of Advanced Materials Science Engineering, Sungkyunkwan University) ;
  • Ahn, Hyo-Chang (School of Advanced Materials Science Engineering, Sungkyunkwan University) ;
  • Kim, Deug-Joong (School of Advanced Materials Science Engineering, Sungkyunkwan University)
  • 홍성진 (성균관대학교 신소재공학부) ;
  • 안효창 (성균관대학교 신소재공학부) ;
  • 김득중 (성균관대학교 신소재공학부)
  • Received : 2010.10.11
  • Accepted : 2010.10.22
  • Published : 2010.11.30

Abstract

Reaction-bonded $Si_3N_4$ has cost-reduction merit because inexpensive silicon powder was used as a start material. But its density was not so high enough to be used for structural materials. So the sintered reaction-bonded $Si_3N_4$techniques were developed to solve the low density problem. In this study the sintered reaction-bonded $Si_3N_4$ manufacturing method by using polymer precursor which recently attained significant interest owing to the good shaping and processing ability was proposed. The formations, properties of reaction-bonded $Si_3N_4$ from silicon and polysilazane mixture were investigated. High density reaction-bonded $Si_3N_4$ was manufactured from silicon and silicon-containing preceramic polymers and post-sintering technique. The mixtures of silicon powder and polysilazane were prepared and reaction sintered in $N_2$ atmosphere at $1350^{\circ}C$ and post-sintered at 1600~$1950^{\circ}C$. Density and phase were analyzed and correlated to the resulting material properties.

Keywords

References

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