Transactions of the Korean Society of Mechanical Engineers B (대한기계학회논문집B)

The Korean Society of Mechanical Engineers (대한기계학회)
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Evaluation of Fine-Particle Removal Performance of Novel ESP with Highly Durable Chargers and Collectors

고내구성 하전 및 집진 방식 전기집진기의 미세입자 제거 특성

  • Kim, Hak-Joon (Environment and Energy Systems Research Division, Korea Institute of Machinery and Materials) ;
  • Han, Bang-Woo (Environment and Energy Systems Research Division, Korea Institute of Machinery and Materials) ;
  • Hong, Won-Seok (Environment and Energy Systems Research Division, Korea Institute of Machinery and Materials) ;
  • Shin, Wan-Ho (Environment and Energy Systems Research Division, Korea Institute of Machinery and Materials) ;
  • Song, Dong-Keun (Environment and Energy Systems Research Division, Korea Institute of Machinery and Materials) ;
  • Jung, Sang-Hyeon (Environment and Energy Systems Research Division, Korea Institute of Machinery and Materials) ;
  • Kim, Yong-Jin (Environment and Energy Systems Research Division, Korea Institute of Machinery and Materials) ;
  • Oh, Won-Suk (Department of Mechanical Design Engineering, Chungnam National University) ;
  • Hwang, Kyu-Dong (Department of Mechanical Design Engineering, Chungnam National University) ;
  • Yoo, Seong-Yeon (Department of Mechanical Design Engineering, Chungnam National University)
  • 김학준 (한국기계연구원 그린환경에너지기계연구본부) ;
  • 한방우 (한국기계연구원 그린환경에너지기계연구본부) ;
  • 홍원석 (한국기계연구원 그린환경에너지기계연구본부) ;
  • 신완호 (한국기계연구원 그린환경에너지기계연구본부) ;
  • 송동근 (한국기계연구원 그린환경에너지기계연구본부) ;
  • 정상현 (한국기계연구원 그린환경에너지기계연구본부) ;
  • 김용진 (한국기계연구원 그린환경에너지기계연구본부) ;
  • 오원석 (충남대학교 기계설계공학과) ;
  • 황규동 (충남대학교 기계설계공학과) ;
  • 유성연 (충남대학교 기계설계공학과)
  • Published : 2010.04.01
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Abstract

Electrostatic precipitators (ESPs) used currently in industries for removing fine particles from semiconductors have to be made of expensive anticorrosive metallic materials in order to maintain their particle-removal performance. To satisfy the economical demands of industries, a novel ESP was developed; in this ESP, the charger is made of carbon fibers and collection plates consist of PET films among which an aluminum sheet is inserted. The ESP was evaluated by changing the voltages applied to the chargers and collection plates, flow rates, and number of charging channels. KCl particles with mean diameters of 100 nm were used, and a scanning mobility particle sizer was used to measure the changes in particle number concentrations upstream and downstream of the ESP. The experimental results showed that more than 90% of the particles were removed by using the ESP containing ionizers with nine channels and 65-mm collection plates at $500\;m^3/hr$ when voltages of 7 kV and 10 kV were applied to the ionizers and collection plates, respectively.

반도체 공정에서 배출되는 미세입자를 포집하기 위하여 전기집진장치가 적용되고 있으나, 배출가스 내 포함된 강부식성 오염원에 의한 전기집진장치 내부 오염 및 부식 문제가 심각하여, 이를 해결하기 위한 방안이 절실하다. 본 연구에서는 탄소섬유로 이루어진 하전부와 PET 필름 사이에 금속 박막이 삽입된 집진부로 이루어진 내부식 전기집진장치를 개발하여, 하전부 및 집진부 인가전압, 처리유량, 하전부 채널 수 등의 운전 조건에 따른 전기집진기의 초미세입자 집진 성능을 평가하였다. 평균입경이 100 nm인 KCl 입자를 시험입자로 사용하였으며, 전기집진기 전/후단 입자 농도 변화를 측정하기 위하여 SMPS를 사용하였다. 본 연구에서 개발된 9채널 하전부와 65 mm 집진부로 구성된 전기집진기의 성능평가 결과, $500\;m^3/hr$ 유량조건에서 하전부 및 집진부에 7 kV와 10 kV를 각각 인가하였을 때, 300 nm입자에 대한 포집효율이 90% 이상으로 높게 나타났다.

Keywords

References

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Cited by

  1. Characteristics of Charging and Collection of 10-nm-Class Ultrafine Nanoparticles in an Electrostatic Precipitator vol.35, pp.10, 2011, https://doi.org/10.3795/KSME-B.2011.35.10.1013