Korean Journal of Air-Conditioning and Refrigeration Engineering (설비공학논문집)

The Society of Air-Conditioning and Refrigerating Engineers of Korea (대한설비공학회)
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A Study on the Improvement of Airflow Deflection in a Cleanroom of Class 1000

Class 1000 클린룸에서 편류 개선에 관한 연구

  • Noh, Kwang-Chul (Department of Mechanical Engineering, Yeonse University) ;
  • Lee, Seung-Chul (Division of Fire and Disaster Prevention, Kangwon National University)
  • Received : 2010.01.28
  • Published : 2010.04.10
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Abstract

We performed 3 dimensional numerical study on the improvement of the airflow deflection in the cleanroom of Class 1000, which is presently operated for the manufacturing process in Korea. The Deflection angle and the non-uniformity were investigated to analyze the airflow characteristics and the performance of cleanroom with variations of the cleanroom occupancy state, the filters' arrangement, and the floor return air system. From the numerical results, we found out that the airflow pattern of the cleanroom is more unidirectional and stable in the condition of at-rest than in the condition of as~built. It is due to that the equipments installed in the cleanroom play a role like partitions, which prevent the airflow from inclining toward the recirculation air duct. And it is needed to arrange the filter units parallel to the equipments array without a gap between them for maintaining the unidirectional airflow pattern. Finally, we knew that it is very important to install the partition like the eyelid above the equipment to keep the unidirectional airflow around the equipments and remove the contaminants quickly.

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References

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