Journal of Sensor Science and Technology (센서학회지)

The Korean Sensors Society (한국센서학회)
권호 표지
DOI QR코드

DOI QR Code

The CO sensing properties of thick film gas sensor using Co3O4 powders prepared by hydrothermal reaction method

수열합성법으로 제조된 Co3O4 분말을 사용한후막 가스센서의 CO 감지 특성

  • 김광희 (경상대학교 공과대학 반도체공학과) ;
  • 김정규 (경상대학교 공학연구원) ;
  • 박기철 (경상대학교 공과대학 반도체공학과)
  • Received : 2010.08.24
  • Accepted : 2010.09.24
  • Published : 2010.09.30
Download PDF
⟨ Previous Next ⟩

Abstract

CO sensing thick film gas sensors using $Co_3O_4$ powders prepared by hydrothermal reaction method, were fabricated, and their structural, electrical and CO gas sensing properties were investigated. The specific surface area of the $Co_3O_4$ powders obtained from BET analysis was about 79.0 $m^2/g$. XRD and SEM results show that the thick films heat-treated at $500^{\circ}C$ for 30 min after screen printing had the preferred orientation of (311) direction and the crystalline size was calculated to 221 $\AA$. The maximum activation energy obtained from the temperature-resistance characteristics was 3.11 eV in the temperature range of $290^{\circ}C$ to $310^{\circ}C$. The sensitivity to 1,000 ppm CO was about 150 %. The specific surface area, crystalline size, and maximum activation energy were increased significantly and the sensitivity for CO gas was improved largely.

Keywords

References

  1. S. D. Choi and B. K. Min, “$Co_{3}O_{4}$-based iso-butane sensor operating at low temperatures”, Sensors and Actuators B, vol. 77, pp. 330-333, 2000.
  2. 정진화, 최순돈, “저온동작용 $Co_{3}O_{4}$ 부탄가스 감 지 소자(I)”, 센서학회지, 제5권, 제6호, pp. 7-14, 1996.
  3. T. Seiyama, A. Kata, K. Fukiishi, and M. Nagatini, “A new detector for gaseous componentsusing semiconductive thin films”, Anal. Chem., Vol. 34 pp. 1502-1504, 1962. https://doi.org/10.1021/ac60191a001
  4. J. Watson, “The tin oxide gas sensor and its applications”, Sensors and Actuators B, vol. 5 pp. 29-42, 1984. https://doi.org/10.1016/0250-6874(84)87004-3
  5. H. Tuller, “Review of electrical properties of metal oxides as applied to temperature and chemical sensing”, Sensors and Actuators B, vol. 4, pp. 679-688, 1983. https://doi.org/10.1016/0250-6874(83)85082-3
  6. N. M. White and J. D. Turner, “Thick-film gas sensor: past, present and future”, Meas. Sci. Technol., pp. 1-20, 1997.
  7. G. Martinelli and M. C. Carotta, “Thick-film gas sensor”, Sensors and Actuators B, vol. 23 pp. 157-161, 1995. https://doi.org/10.1016/0925-4005(95)01267-2
  8. M. Prudenziati, “Thick-film technology”, Sensors and Actuators A, vol. 25-26, pp. 241-246, 1991.
  9. J. Park, X. Shen, and G. Wang, “Solvothermal synthesis and gas-sensing performance of $Co_{3}O_{4}$ hollow nanospheres”, Sensors and Actuators B, vol. 136, pp. 494-498, 2009. https://doi.org/10.1016/j.snb.2008.11.041
  10. P. T. Moseley, “Thick film semiconductor gas sensor in Thick Film Sensors”, M. Prudenziati Elsevier, Amsterdam, p. 289, 1994.
  11. S. W. Lee, P. P. Tsai, and H. Chen, “Comparison study of $SnO_2$ thin and thick film gas sensors”, Sensors and Actuators B, vol. 67, pp. 122-127, 2000. https://doi.org/10.1016/S0925-4005(00)00390-7
  12. G. Zhang and M. Liu, “Effect of particle size and dopant on properties of $SnO_2$-based gas sensors”, Sensors and Actuators B, vol. 69, pp. 144-152, 2000. https://doi.org/10.1016/S0925-4005(00)00528-1
  13. 조철형, 박기철, 마대영, 김정규, “$Cr_{2}O_{3}$ 후막의 암 모니아 가스 감지 특성”, 센서학회지, 제13권, 제6호, pp. 424-429, 2004.

Cited by

  1. The Characteristics of ZnO/SnO2Sensing Materials by Ultrasonic and Hydrothermal Treatments to Volatile Organic Compounds vol.21, pp.6, 2012, https://doi.org/10.5369/JSST.2012.21.6.446
  2. Small Methane Detection System using Optical Spectrum Characteristics vol.20, pp.1, 2011, https://doi.org/10.5369/JSST.2011.20.1.53
  3. The Gas Sensing Properties of Thick Film Gas Sensor Using Co3O4Powder Prepared by Hydrothermal Reaction Method vol.20, pp.6, 2011, https://doi.org/10.5369/JSST.2011.20.6.406