DOI QR코드

DOI QR Code

Experimental Study on the Operation of a Keyhole-Shaped Lens in a Microcolumn

  • Received : 2011.09.23
  • Accepted : 2011.12.05
  • Published : 2011.12.25

Abstract

An advanced microcolumn is proposed which adopts a modified einzel lens structure. The newly designed einzel lens is composed of four electrodes. The two center electrodes are specially designed electrostatic quadrupole (EQ) einzel lenses having keyhole instead of circular apertures. We constructed the advanced microcolumn with the EQ-einzel lenses, and operated the newly designed microcolumn in single lens mode and double-lens mode. The preliminary results show that the EQ-einzel lens can improve the performance of the micro-column for large sample applications.

Keywords

References

  1. T. H. P. Chang, D. P. Kern, and M. A. McCord, "Electron optical performance of a scanning tunneling microscope controlled field emission microlens system," J. Vac. Sci. Technol. B 7, 1855-1861 (1989). https://doi.org/10.1116/1.584680
  2. E. Kratschmer, H. S. Kim, M. G. R. Thomson, K. Y. Lee, S. A. Rishton, M. L. Yu, and T. H. P. Chang, "Sub‐40 nm resolution 1 keV scanning tunneling microscope field‐emission microcolumn," J. Vac. Sci. Technol. B 12, 3503-3507 (1994). https://doi.org/10.1116/1.587459
  3. Y. C. Kim, H. S. Kim, S. J. Ahn, H. W. Kim, T. Yoshimoto, and D. W. Kim, "Advanced microcolumn operation for low-energy electron-beam lithography," J. Korean Phys. Soc. 49, 1428-1433 (2006).
  4. D. A. Crewe, D. C. Perng, S. E. Shoaf, and A. D. Feinerman, "Micromachined electrostatic electron source," J. Vac. Sci. Technol. B 10, 2754-2758 (1992). https://doi.org/10.1116/1.585996
  5. T. H. P. Chang, M. G. R. Thomson, E. Kratschmer, H. S. Kim, M. L. Yu, K. Y. Lee, S. A. Rishton, B. W. Hussey, and S. Zolgharnain, "Electron‐beam microcolumns for lithography and related applications," J. Vac. Sci. Technol. B 14, 3774-3781 (1996). https://doi.org/10.1116/1.588666
  6. H. S. Kim, D. W. Kim, S. J. Ahn, Y. C. Kim, S. S. Park, K. W. Park, N. W. Hwang, S. W. Jin, and S. Y. Bae, "Feasibility study of TFT-LCD array tester using low voltage micro-columns," Microelectron. Eng. 85, 782-786 (2008). https://doi.org/10.1016/j.mee.2007.12.042
  7. T. S. Oh, D. W. Kim, Y. C. Kim, S. Ahn, G. Lee, and H. S. Kim, "Inspection of open defects in a thin film transistorliquid crystal display panel by using a low-energy electron microcolumn," J. Vac. Sci. Technol. B 28, C6C69-C6C74 (2010). https://doi.org/10.1116/1.3502658
  8. T. S. Oh, D. W. Kim. S. Ahn, Y. C. Kim, S. J. Ahn, and H. S. Kim, "Optimization of electrostatic lens systems for low-energy scanning microcolumn applications," J. Vac. Sci. Technol. A 26, 1443-1449 (2008). https://doi.org/10.1116/1.2987949
  9. H. S. Kim, D. W. Kim, S. J. Ahn, Y. C. Kim, S. S. Park, S. K. Choi, and D. Y. Kim, "The assembly of a fully functional microcolumn and its STEM-Mode operation," J. Korean Phys. Soc. 43, 831-835 (2003).
  10. S. Ahn, D. W. Kim, H. S. Kim, J. Cho, and S. J. Ahn, "Fabrication of a miniaturized electron lens system and laser micro-machining condition for silicon membrane," Microelectron. Eng. 69, 57-64 (2003). https://doi.org/10.1016/S0167-9317(03)00229-6
  11. S. S. Park, D. W. Kim, S. Ahn, Y. C. Kim, S. K. Choi, D. Y. Kim, and H. S. Kim, "High-beam-current microcolumns with large apertures," Jpn. J. Appl. Phys. 43, 3986-3989 (2004). https://doi.org/10.1143/JJAP.43.3986
  12. E. Kratschmer, H. S. Kim, M. G. R. Thomson, Y. Lee, S. A. Rishton, M. L. Yu, and T. H. P. Chang, "An electronbeam microcolumn with improved resolution, beam current, and stability," J. Vac. Sci. Technol. B 13, 2498-2503 (1995).
  13. M. Mankos, K. Y. Lee, L. Muray, J. Spallas, Y. Hsu, C. Stebler, W. DeVore, E. Bullock, and T. H. P. Chang, "Optimization of microcolumn electron optics for high-current applications," J. Vac. Sci. Technol. B 18, 3057-3060 (2000). https://doi.org/10.1116/1.1321756

Cited by

  1. Forming a Fresnel Zone Lens: Effects of Photoresist on Digital-micromirror-device Maskless Lithography with Grayscale Exposure vol.16, pp.2, 2012, https://doi.org/10.3807/JOSK.2012.16.2.127