Journal of the Korean Society for Heat Treatment (열처리공학회지)

The Korean Society for Heat Treatment (한국열처리공학회)
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Characterization of Hydrogen Gas Sensitivity of TiO2 Thin Films with Electron Beam Irradiation

전자빔 열처리에 따른 TiO2 박막의 수소가스 검출 특성 연구

  • Heo, S.B. (School of Materials Science and Engineering, University of Ulsan) ;
  • Lee, H.M. (School of Materials Science and Engineering, University of Ulsan) ;
  • Jung, C.W. (School of Materials Science and Engineering, University of Ulsan) ;
  • Kim, S.K. (School of Materials Science and Engineering, University of Ulsan) ;
  • Lee, Y.J. (Ulsan Fine Chemical Industry Center, Materials Analytical Team) ;
  • Kim, Y.S. (R&D Division, New Optics LTD.) ;
  • You, Y.Z. (School of Materials Science and Engineering, University of Ulsan) ;
  • Kim, D. (School of Materials Science and Engineering, University of Ulsan)
  • 허성보 (울산대학교 첨단소재공학부) ;
  • 이학민 (울산대학교 첨단소재공학부) ;
  • 정철우 (울산대학교 첨단소재공학부) ;
  • 김선광 (울산대학교 첨단소재공학부) ;
  • 이영진 (울산정밀화학지원센터 소재분석평가팀) ;
  • 김유성 (뉴옵틱스 기술연구소) ;
  • 유용주 (울산대학교 첨단소재공학부) ;
  • 김대일 (울산대학교 첨단소재공학부)
  • Received : 2010.11.05
  • Accepted : 2011.01.03
  • Published : 2011.01.30
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Abstract

$TiO_2$ films were deposited on a glass substrate with RF magnetron sputtering and then surface of $TiO_2$ films were electron beam irradiated in a vacuum condition to investigate the effect of electron bombardment on the thin film crystallization, surface roughness and gas sensitivity for hydrogen. $TiO_2$ films that electron beam irradiated at 450eV were amorphous phase, while the films irradiated at 900 eV show the anatase (101) diffraction peak in XRD pattern. AFM measurements show that the roughness is depend on the electron irradiation energy. As increase the hydrogen gas concentration and operation temperature, the gas sensitivity of $TiO_2$ and $TiO_2$/ZnO films is increased proportionally and $TiO_2$ films that electron beam irradiated at 900 eV show the higher sensitivity than the films were irradiated at 450eV. From the XRD pattern and AFM observation, it is supposed that the crystallization and rough surface promote the hydrogen gas sensitivity of $TiO_2$ films.

Keywords

References

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