Journal of the Korean Society for Precision Engineering (한국정밀공학회지)

Korean Society for Precision Engineering (한국정밀공학회)
권호 표지

Modularized Flexure-Hinge Nanopositioner Based on Four-Bar-Link-Mechanism

4절 링크구조를 응용한 플랙셔 힌지 기반 모듈형 나노포지셔너

  • Chae, Ki-Woon (Graduate School of Knowledge-Based Technology & Energy, Korea Polytechnic Univ.) ;
  • Bae, Jin-Hyun (Graduate School of Knowledge-Based Technology & Energy, Korea Polytechnic Univ.) ;
  • Jeong, Young-Hun (Department of Mechanical Engineering, Korea Polytechnic Univ.)
  • 채기운 (한국산업기술대학교 지식기반 기술.에너지 대학원) ;
  • 배진현 (한국산업기술대학교 지식기반 기술.에너지 대학원) ;
  • 정영훈 (한국산업기술대학교 기계공학과)
  • Received : 2010.11.01
  • Accepted : 2011.04.18
  • Published : 2011.07.01
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Abstract

Nanopositioning technologies play an important role in the progress of electronics, optics, bio-engineering and various nano-scale technologies. As a result, various practical nanopositioning methods have been successfully introduced. Flexure mechanism is a valuable method in nanopositioning because of smooth and friction-free motion and the infinitesimal movement near to sub-nm. In this study a modularized nanopositioner based on parallelogram four-bar linkage structure with right-circular flexure hinge was developed. The positioning performance of a single axis nanopositioner and a XY nanopositioner which was extended from single axis one were demonstrated using control experiments. Consequently, it was shown that the developed single axis nanopositioner possessed high performance and could be extended to various multi-axis nanopositioners.

Keywords

References

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