한국생산제조학회지 (Journal of the Korean Society of Manufacturing Technology Engineers)

  • 제20권4호
  • /
  • Pages.472-477
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  • 2011
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  • 2508-5093(pISSN)
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  • 2508-5107(eISSN)
한국생산제조학회 (The Korean Society of Manufacturing Technology Engineers)
권호 표지

공초점 현미경용 장초점 마이크로렌즈 제작

Fabrication of Micro-Lens Array with Long Focal Length for Confocal Microscopy

  • 김기홍 (한국기계연구원 나노공정장비연구실) ;
  • 임형준 (한국기계연구원 나노공정장비연구실) ;
  • 정미라 (한국기계연구원 나노공정장비연구실) ;
  • 이재종 (한국기계연구원 나노공정장비연구실) ;
  • 최기봉 (한국기계연구원 나노공정장비연구실) ;
  • 이형석 ((주)나노시스템) ;
  • 도이미 (한국전자통신 연구원 RFID/USN 소자팀)
  • 투고 : 2011.05.02
  • 심사 : 2011.06.30
  • 발행 : 2011.08.15
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초록

This paper shows the method of fabrication of a micro lens array comprised of a Nipkow disk used in a large-area, high-speed confocal microscopy. A Nipkow disk has two components, a micro lens array disk and a pinhole array disk. The microlens array focuses illumination light onto the pinhole array disk and redirects reflected light from a surface to a sensor. The micro lens which are positioned in order on a disk have a hemispheric shape with a few tens of micron in diameter, and can be fabricated by a variety of methods like mechanical machining, semiconductor process, replication process like imprinting process. This paper shows how to fabricate the micro lens array which has a long focal length by reflow and imprinting process.

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참고문헌

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