나노 다공 구조를 가진 알루미나 재료의 UV 레이저 미세가공에 관한 실험적 기초 연구

Basic Experimental Investigations to UV Laser Micro-Machining of Nano-Porous Alumina Ceramic Material

  • 신보성 (부산대학교 정밀정형 및 금형가공연구소(ERC/NSDM)) ;
  • 이정한 (부산대학교 대학원 기계공학과)
  • 발행 : 2012.02.29

초록

Recently UV laser is widely used to process micro parts using various materials such as polymers, metals and ceramics because it has a very high intensity at the focused spot area. It is generally known that there are still some difficulties for alumina($Al_2O_3$) ceramics to directly make micro patterns like holes and lines on the surface of working material using 355nm UV laser because the alumina has a very low absorption coefficient at that wavelength. But nowadays new alumna with nano-porous holes is developed and applied to advanced micro functional parts of IT, BT and BT industries. In this paper, we are going to show the mechanism of photo-thermal ablation for nano-porous ceramics. Inside hole there is a lot of multiple reflections along the depth of hole. Experimentally we can find the micro hole drilling and micro grooving on the surface of nano-porous alumina.

키워드

참고문헌

  1. The Korean Ceramic Society, "www.kcers.or.kr", 세라믹스 정보
  2. Perrie, W., Rushton, A., Gill, M., Fox, P. and O., Neill, W., "Femtosecond laser micro-structuring of alumina ceramic", Appl. Surf. Sci, Vol. 248(1-4), pp. 213-217, 2005. https://doi.org/10.1016/j.apsusc.2005.03.005
  3. Pandey, P. C. and Shan, H. S., "Modern Machining Processes", McGrawHill, New Delhi, 1980.
  4. Longfellow, J., "High speed drilling in alumina substrates with a $CO_2$ laser", Am. Ceram. Soc. Bull., Vol. 50(3), pp. 251-253, 1971.
  5. Samant, A. N. and Dahotre, N. B., "Computational predictions in single dimensional laser machining of alumina", Int. J. Mach. Tools Manuf., Vol. 48, pp. 1345-1353, 2008 https://doi.org/10.1016/j.ijmachtools.2008.05.004
  6. Glaw, V., Hahn, R., Paredes, A., Hein, U., Ehrmann, O. and Reichl, H., "Laser machining of ceramics and silicon for MCM-D applications", In Proceedings of the 3rd International Symposium on Adv. Packaging Mater, pp. 173-176, 1997.
  7. Fei Zhang, Jun Duan., Xiaoyan Zeng, Yu Cao, "UV laser microprocessing and post chemical etching on ultrathin $Al_2O_3$ ceramic substrate", Journal of the European Ceramic Society, Vol. 31, pp. 1631-1639, 2011. https://doi.org/10.1016/j.jeurceramsoc.2011.03.034
  8. Dahotre, N. B. and Harimkar, S. P., Laser Fabrication and Machining of Materials. Springer, New York, NY, 2008.
  9. Shin. B.S., Oh. J.Y. and Sohn. H., "theoretical and experimental investigations into laser ablation of polyimide and copper films with 355nm Nd:YVO4 laser", Journal of Materials Processing Technology, Vol. 187-188, pp. 260-263, 2007. https://doi.org/10.1016/j.jmatprotec.2006.11.106
  10. "http://www.matweb.com"
  11. Ananthapadmanabhan, P. V., Thiyagarajan, T. K., Sreekumar, K. P. and Venkatramani, N., Formation of nano-sized alumina by in-flight oxidation of aluminium powder in a thermal plasma reactor. Scr. Mater., Vol. 50(1), pp. 143-147, 2004. https://doi.org/10.1016/j.scriptamat.2003.09.001