Journal of the Korean Society of Manufacturing Technology Engineers (한국생산제조학회지)

The Korean Society of Manufacturing Technology Engineers (한국생산제조학회)
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Design of the Air Pressure Pick-up Head for Non-Contact Wafer Gripper

비접촉식 웨이퍼 그리퍼용 공압 파지식 헤드 설계

  • 김준현 (서울과학기술대학교 기계공학과)
  • Received : 2011.12.01
  • Accepted : 2012.02.03
  • Published : 2012.06.15
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Abstract

The recent manufacturing process in the thin wafers and flat panel necessitate new approaches to reduce handling fragile and surface-sensitive damage of components. This paper presents a new pneumatic levitation for non-contact handling of parts and substrates. This levitation can achieve non-contact handling by blowing air into an air pressure pick-up head with radial passages to generate a negative pressure region. Negative pressure is caused by the radial air flow by nozzle throat and through holes connecting to the bottom region. The numerical analysis deals with the levitational motion with different design factors. The dynamic motion is examined in terms of force balance(dynamic equilibrium) occurring to the flow field between two objects. The stable equilibrium position and the safe separation distance are determined by analyzing the local pressure distribution in the fluid motion. They make considerable design factors consisting the air pressure pick-up head. As a result, in case that the safe separation distance is beyond 0.7mm, the proposed pick-up head can levitate stably at the equilibrium position. Furthermore, it can provide little effect of torque, and obtain more wide picking region according to the head size.

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References

  1. Sehyoung, n.d, viewed 29 November 2011, .
  2. Air Bearing, 2003, Air Bearing Application and Design Guide, New Way Precision, rev D, pp. 4-12.
  3. Apgar, D. H., and Kilburn, R. F., 2006, Bernoulli Pickup Head with Self-Restoring Anti-Tilt Improvement, US Patent: 4029351.
  4. Li, X., Kawashima, K., and Kagawa, Y., 2008, "Analysis of Vortex Levitation," Experimental Thermal and Fluid Science, Vol. 32, No. 8, pp. 1448-1454. https://doi.org/10.1016/j.expthermflusci.2008.03.010
  5. Davies, S., Gray, J. O., and Caldwell, D. G., 2008, "An End Effector Based on the Bernoulli Principle for Handling Sliced Fruit and Vegetables," Robotics and Computer- Integrated Manufacturing, Vol. 24, No. 24, pp. 249-257. https://doi.org/10.1016/j.rcim.2006.11.002
  6. Vandaele, V., Lambert, P., and Delchambre, A., 2005, "Non-contact Handling in Microassembly Acoustical Levitation," Precision Engineering, Vol. 29, No. 4, pp. 491-505. https://doi.org/10.1016/j.precisioneng.2005.03.003
  7. Lee, I. S., 2002, "Magnetic Bearings," Tech Trend Report, KISTI.
  8. Jeon, J. U., 2006, "Electrostatic Suspension and Transportation Device of Glass Panels," J. Korean Soc. Precision Eng., Vol. 23, No. 3, pp. 76-85.
  9. Chen, X. D., and He, X. M., 2006, "The Effect of the Recess Shape on Performance Analysis of the Gaslubricated Bearing in Optical Lithography," Tribology International, Vol. 39, No. 11, pp. 1336-1341. https://doi.org/10.1016/j.triboint.2005.10.005
  10. Reinhart, G., and Hoeppner, J., 2000, "Non-contact Handling Using High-intensity Ultrasonics," Annals of the CIRP, Vol. 49, No. 1, pp. 5-8. https://doi.org/10.1016/S0007-8506(07)62884-4

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