Journal of the Korean Society for Precision Engineering (한국정밀공학회지)

Korean Society for Precision Engineering (한국정밀공학회)
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Micromachining Using Laser Beam Machining and Electrochemical Etching

레이저 빔 가공과 전해 에칭을 이용한 미세 가공

  • Kim, Jang-Woo (Department of Chemical Engineering, Yonsei Univ.) ;
  • Kwon, Min-Ho (School of Mechanical and Aerospace Engineering, Seoul National Univ.) ;
  • Chung, Do-Kwan (School of Robot and Automation Engineering, Dongyang Mirae Univ.) ;
  • Chu, Chong-Nam (School of Mechanical and Aerospace Engineering, Seoul National Univ.)
  • 김장우 (연세대학교 화학공학과) ;
  • 권민호 (서울대학교 기계항공공학부) ;
  • 정도관 (동양미래대학교 로봇자동화공학부) ;
  • 주종남 (서울대학교 기계항공공학부)
  • Received : 2011.11.01
  • Accepted : 2012.07.03
  • Published : 2012.10.01
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Abstract

Laser beam machining (LBM) using nanosecond pulsed laser is widely known to be rapid and non-wear process for micromachining. However, the quality itself cannot meet the precision standard due to the recast layer and heat affected zone. In this paper, a fabrication method for machining micro features in stainless steel using a hybrid process of LBM using nanosecond pulsed laser and electrochemical etching (ECE) is reported. ECE uses non-contacting method for precise surface machining and selectively removes the recast layer and heat affected zone produced by laser beam in an effective way. Compared to the single LBM process, the hybrid process of LBM and ECE enhanced the quality of the micro features.

Keywords

References

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Cited by

  1. Laser Micro Machining and Electrochemical Etching After Surface Coating vol.30, pp.6, 2013, https://doi.org/10.7736/KSPE.2013.30.6.638