Transactions on Electrical and Electronic Materials

The Korean Institute of Electrical and Electronic Material Engineers (한국전기전자재료학회)
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Analysis of High Vacuum System Based on the Applications of Vacuum Materials

  • Kim, Hyung-Taek (Department of Advanced Materials Engineering, College of Engineering, Incheon National University)
  • Received : 2013.09.11
  • Accepted : 2013.11.25
  • Published : 2013.12.25
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Abstract

In this study, the outgassing effects of selected vacuum materials on the vacuum characteristics were simulated by the $VacSim^{Multi}$ simulation tool. This investigation examined the feasibility of reliably simulating the outgassing characteristics of common vacuum chamber materials (aluminum, copper, stainless steel, nickel plated steel, Viton A). The optimum design factors for these vacuum systems were suggested based on the simulation results. The baking-out effects of the modeled systems and materials on the performance of the vacuum system were also analyzed. The simulation predicted that the overall outgassing effect was more significant in the turbomolecular pump system than in the diffusion pump system and that the utilization of a booster pump has a greater effect on the evacuation time than on the ultimate pressure.

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  1. Simulation of Modeling Characteristics of Pumping Design Factor on Vacuum System vol.5, pp.2, 2016, https://doi.org/10.7236/IJASC.2016.5.2.1