Journal of the Korean Institute of Electrical and Electronic Material Engineers (한국전기전자재료학회논문지)

The Korean Institute of Electrical and Electronic Material Engineers (한국전기전자재료학회)
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Structural and Optical Properties of Multilayer Films of IGZO / Ag / IGZO for Low Emissivity Applications

Low-e용 산화물 다층박막 IGZO/Ag/IGZO의 구조적, 광학적 특성 분석

  • Wang, Hong Rae (Department of Electronic Engineering Cheongju University) ;
  • Kim, Hong Bae (Department of Semiconductor Engineering Cheongju University) ;
  • Lee, Sang Yeol (Department of Semiconductor Engineering Cheongju University)
  • 왕홍래 (청주대학교 전자공학과) ;
  • 김홍배 (청주대학교 반도체공학과) ;
  • 이상렬 (청주대학교 반도체공학과)
  • Received : 2013.01.28
  • Accepted : 2013.03.24
  • Published : 2013.04.01
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Abstract

In this study, The RF magnetron sputter and evaporator was on glass substrates 30 mm ${\times}$ 30 mm OMO multilayer thin film structure is applied to the low-e. Structural and optical properties, a thin film was produced, the variable was placed into a variable deposition time of the oxide layer. According to the XRD measurement results there is no peak that satisfies the Bragg's law ($2dsin{\theta}=n{\lambda}$) which confirmed that it is an amorphous structure. RMS value of the results of the AFM measurement, has a roughness of less than 2 nm. transmittance measurements results, visible light region an average 80%, IR region 40% showed.

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References

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