Journal of the Korean Society of Manufacturing Process Engineers (한국기계가공학회지)

The Korean Society of Manufacturing Process Engineers (한국기계가공학회)
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Development of Auto Positioning Laser System by using Image Measurement Data

영상 측정 데이터를 이용한 위치보정 레이저 가공시스템 개발

  • Pyo, Chang-Ryul (Department of Mechanical and Automotive Engineering INDUK University)
  • Published : 2013.06.30
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Abstract

Recently, electronic equipments become smaller, more functional, and more complex than before. As these trends, MLC(multi-layer ceramic) circuit has been emerged to a promising technology in semiconductor inspection industry. Especially, multi-layer ceramic which is consisted of many fine-pitch multi-hole is used to produce a semiconductor inspection unit. The hole is processed by UV laser. But, working conditions are changed all the time. Therefore real time measurement of fine-pitch multi-hole is very important method for ensuring performance. In this paper we found the best method for illuminating and auto focusing. And, we verified our equipment.

Keywords

References

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