Journal of the Korean Ceramic Society (한국세라믹학회지)

The Korean Ceramic Society (한국세라믹학회)
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Plasma Resistance Evaluation and Characteristics of Yttria Ceramics Sintered by Using Calcination Yttria

하소이트리아 소결체의 특성과 플라즈마저항성 평가

  • Choi, Jinsam (Department of Ceramic Engineering, Gyeongsang National University) ;
  • Nakayama, Tadachika (Department of Electrical Engineering/Electronic Devices and Optical Electronics group, Nagaoka University of Technology) ;
  • Bae, Won Tae (Department of Ceramic Engineering, Gyeongsang National University)
  • 최진삼 (경상대학교 세라믹공학전공) ;
  • ;
  • 배원태 (경상대학교 세라믹공학전공)
  • Received : 2013.07.09
  • Accepted : 2013.08.29
  • Published : 2013.09.30
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Abstract

The evaluation of plasma resistance and the characteristics of yttria ceramics fabricated by calcination yttria as a starting material without dopants under an oxidation atmosphere was investigated. Regardless of the starting materials, as-received, and calcined yttria powder, XRD patterns showed that all samples have $Y_2O_3$ phase. The three cycling process inhibited a large grain, which occurs frequently during the yttria sintering, and a high density ceramic with a homogeneous grain size was obtained. The grain size of the sintered ceramic was affected by the starting powders. The smaller the grain size, the larger were the Young's modulus and KIC. Compared to $Al_2O_3$ and $ZrO_2$ ceramics, yttria ceramics showed a 3 times larger plasma resistance and a 1.4~2.2 times lower weight loss during the plasma etching test, respectively.

Keywords

References

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