Journal of the Korean institute of surface engineering (한국표면공학회지)

The Korean Institute of Surface Engineering (한국표면공학회)
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Characteristics of NbN Films Deposited on AISI 304 Using Inductively Coupled Plasma Assisted DC Magnetron Sputtering Method

  • Jun, Shinhee (School of Materials Science and Engineering, University of Ulsan) ;
  • Kim, Junho (Advanced Hybrid Production Technology Center, Korea Institute of Industrial Technology) ;
  • Kim, Sunkwang (School of Materials Science and Engineering, University of Ulsan) ;
  • You, Yong Zoo (School of Materials Science and Engineering, University of Ulsan) ;
  • Cha, Byungchul (Advanced Hybrid Production Technology Center, Korea Institute of Industrial Technology)
  • Received : 2013.10.02
  • Accepted : 2013.10.25
  • Published : 2013.10.30
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Abstract

Niobium nitride (NbN) films were deposited on AISI 304 stainless steels by inductively coupled plasma (ICP) assisted dc magnetron sputtering method at different ICP powers, and the effects of ICP power on the phase formation, mechanical and chemical properties of the films were investigated. X-ray diffraction analysis (XRD) and field emission scanning electron microscopy (FESEM) were used to analyze the crystal structure and micro-knoop hardness was used to measure the hardness of the films. Also, 3-D mechanical profiler and a ball-on-disk wear tester were used to measure the thickness of the films and to estimate wear characteristics, respectively. The thickness of the films decreased but their hardness increased with increasing ICP power, and it was confirmed that only cubic ${\delta}$-NbN(200) remained at high ICP power. At lower ICP powers, a mixture of the hexagonal ${\delta}^{\prime}$-NbN and cubic ${\delta}$-NbN phases was obtained in the films and the hardness decreased. The corrosion potential value increased gradually with increasing ICP power, but the changes of ICP power did not significantly influence the overall corrosion resistance.

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