Journal of Sensor Science and Technology (센서학회지)

The Korean Sensors Society (한국센서학회)
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Chemiresistive Sensor Array Based on Semiconducting Metal Oxides for Environmental Monitoring

  • Moon, Hi Gyu (Electronic Materials Research Center, Korea Institute of Science and Technology) ;
  • Han, Soo Deok (Electronic Materials Research Center, Korea Institute of Science and Technology) ;
  • Kang, Min-Gyu (Electronic Materials Research Center, Korea Institute of Science and Technology) ;
  • Jung, Woo-Suk (Electronic Materials Research Center, Korea Institute of Science and Technology) ;
  • Jang, Ho Won (Department of Materials Science and Engineering, Research Institute of Advanced Materials, Seoul National University) ;
  • Yoo, Kwang Soo (Department of Materials Science and Engineering, University of Seoul) ;
  • Park, Hyung-Ho (Materials Science and Engineering, Yonsei University) ;
  • Kang, Chong Yun (Electronic Materials Research Center, Korea Institute of Science and Technology)
  • Received : 2013.12.24
  • Accepted : 2014.01.14
  • Published : 2014.01.29
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Abstract

We present gas sensing performance based on $2{\times}2$ sensor array with four different elements ($TiO_2$, $SnO_2$, $WO_3$ and $In_2O_3$ thin films) fabricated by rf sputter. Each thin film was deposited onto the selected $SiO_2$/Si substrate with Pt interdigitated electrodes (IDEs) of $5{\mu}m$ spacing which were fabricated on a $SiO_2$/Si substrate using photolithography and dry etching. For 5 ppm $NO_2$ and 50 ppm CO, each thin film sensor has a different response to offers the distinguishable response pattern for different gas molecules. Compared with the conventional micro-fabrication technology, $2{\times}2$ sensor array with such remarkable response pattern will be open a new foundation for monolithic integration of high-performance chemoresistive sensors with simplicity in fabrication, low cost, high reliablity, and multifunctional smart sensors for environmental monitoring.

Keywords

References

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