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Current Status and Technical Issues of Ultra-precision Machine Tools

초정밀 가공기의 개발 동향 및 기술적 이슈

  • Oh, Jeong Seok (Advanced Manufacturing Systems Research Division, Korea Institute of Machinery & Materials) ;
  • Kim, Chang-Ju (Advanced Manufacturing Systems Research Division, Korea Institute of Machinery & Materials) ;
  • Park, Chun Hong (Advanced Manufacturing Systems Research Division, Korea Institute of Machinery & Materials) ;
  • Choi, Young Jae (IT Converged Process R&D Group, Korea Institute of Industrial Technology)
  • 오정석 (한국기계연구원 첨단생산장비연구본부) ;
  • 김창주 (한국기계연구원 첨단생산장비연구본부) ;
  • 박천홍 (한국기계연구원 첨단생산장비연구본부) ;
  • 최영재 (한국생산기술연구원 IT융합공정연구그룹)
  • Received : 2014.02.05
  • Accepted : 2014.02.21
  • Published : 2014.03.01

Abstract

Diffractive optical elements (DOEs) - in general a complex pattern of micro- and nano-scale structures - can modulate and transform light in a predetermined way. Their importance is being increased nowadays because they can be designed to handle a number of simultaneous tasks. In view point of machining DOEs, it is a big challenge to fabricate micro- and nano-scale structures on a free-form surfaces. In this paper, the state-of-the-art of the ultra-precision machine tools is reviewed. Also some technical issues which determine the machine tool accuracy are discussed.

Keywords

References

  1. Luo, X., Cheng, K., Webb, D., and Wardle, F., "Design of Ultraprecision Machine Tools with Applications to Manufacture of Miniature and Micro Components," J. Materials Processing Technology, Vol. 167, No. 2-3, pp. 515-528, 2005. https://doi.org/10.1016/j.jmatprotec.2005.05.050
  2. Dornfeld, D., Min, S., and Takeuchi, Y., "Recent Advances in Mechanical Micromachining," Annals of the CIRP, Vol. 55, No. 2, pp. 745-768, 2006. https://doi.org/10.1016/j.cirp.2006.10.006
  3. Konica Minolta, "Precision Lens Technology," http://www.konicaminolta.com/about/research/core_technology/ processing/lens.html (Accessed 20 Feb. 2014)
  4. Takino, H., Kawai, T., and Takeuchi, Y., "5-axis Control Ultra-precision Machining of Complex-shaped Mirrors for Extreme Ultraviolet Lithography System," Annals of the CIRP, Vol. 56, No. 1, pp. 123-126, 2007. https://doi.org/10.1016/j.cirp.2007.05.031
  5. Moore Nanotechnology Systems, "Nanotech 450UPL," http://www.nanotechsys.com/machines/nanotech-450upl-ultra-precision-lathe-1/html (Accessed 20 Feb. 2014)
  6. FANUC Corporation, "Super Nano Machine Exploring Nano Field, FANUC ROBONANO ${\alpha}$-0iB," http://www.fanuc.co.jp/en/product/robonano/ index.html (Accessed 20 Feb. 2014)
  7. Mori Seiki Co., Ltd, "Brochure of NN1000 DCG HSC," 2011.
  8. Kim, C. J., Kim, J., Min, S., and Mori, M., "Design and Uncertainty Analysis of a 5-axis Ultra-precision Machine Tool," Proc. of the Int. Conf. on High Performance Cutting, 2010.
  9. Kawai, T., Ebihara, K., and Takeuchi, Y., "Improvement of Machining Accuracy of 5-axis Control Ultraprecision Machining by Means of Laminarization and Mirror Surface Finishing," Annals of the CIRP, Vol. 54, No. 1, pp. 329-332, 2005. https://doi.org/10.1016/S0007-8506(07)60115-2
  10. Shim, J., Park, C. H., and Song, C. K., "On Nanometer Positioning Control of Ultra-precision Hydrostatic Bearing Guided Feeding Table," J. Korean Soc. Precis. Eng., Vol. 30, No. 12, pp. 1313-1320, 2013. https://doi.org/10.7736/KSPE.2013.30.12.1313
  11. Park, C. H., Oh, Y. J., Shamoto, E., and Lee, D. W., "Compensation for Five DOF Motion Errors of Hydrostatic Feed Table by Utilizing Actively Controlled Capillaries," Precision Engineering, Vol. 30, No. 3, pp. 299-305, 2006. https://doi.org/10.1016/j.precisioneng.2005.10.002
  12. Oh, J. S., Khim, G., Oh, J. S., and Park, C. H., "Precision Measurement of Rail Form Error in a Closed Type Hydrostatic Guideway," Int. J. Precis. Eng. Manuf., Vol. 13, No. 10, pp. 1853-1859, 2012. https://doi.org/10.1007/s12541-012-0243-8
  13. Jeong, J. H., Oh, J. S., Khim, G., and Park, C. H., "A Study on the Effect of the Sensor Gain Error in the Precision Measurement of Straightness Error Using Mixed Sequential Two-Probe Method," J. Korean Soc. Precis. Eng., Vol. 30, No. 6, pp. 607-614, 2013. https://doi.org/10.7736/KSPE.2013.30.6.607
  14. Oh, J. S., Khim, G., Park, C. H., Chung, S. J., Lee, S. K., and Kim, S. J., "Accuracy Simulation of the Precision Linear Motion Systems," J. Korean Soc. Precis. Eng., Vol. 28, No. 3, pp. 275-284, 2011.
  15. Khim, G., Oh, J. S., and Park, C. H., "Analysis of 5-DOF Motion Errors Influenced by the Guide Rails of an Aerostatic Linear Motion Stage," Int. J. Precis. Eng. Manuf., Vol. 15, No. 2, pp. 283-290, 2014. https://doi.org/10.1007/s12541-014-0336-7
  16. Lawrence Livermore National Laboratory, "Science & Technology REVIEW, The World's Most Accurate Lathe," https://www.llnl.gov/str/April01/Klingmann. html (Accessed 20 Feb. 2014)
  17. Saito, T. T., Wasley, R. J., Stowers, I. F., Donaldson, R. R., and Tompson, D. C., "Precision and Manufacturing at the Lawrence Livermore National Laboratory," NASA's Fourth National Technology Transfer Conference and Exposition, 1993.
  18. FANUC Corporation, "The Development of Ultra-Precision Machine Tool," http://www.fbi-award.jp/sentan/jusyou/2005/fanuc.pdf (Accessed 20 Feb. 2014)
  19. Ruijl, T., "Ultra Precision Coordinate Measuring Machine - Design, Calibration and Error Compensation," Ponsen & Looijen, 2nd ed., pp. 164-166, 2002.
  20. Oh, J. S., Song, C. K., Hwang, J., Shim, J. Y., and Park, C. H., "An Ultra-precision Lathe for Large-area Micro-structured Roll Molds," J. Korean Soc. Precis. Eng., Vol. 30, No. 12, pp. 1303-1312, 2013. https://doi.org/10.7736/KSPE.2013.30.12.1303