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Fabrication of Piezo-Driven Micropositioning Stage using 3D printer

3D 프린터를 사용한 정밀 스테이지의 제작

  • Jung, Ho Je (Department of Mechatronics Engineering, Kyung Sung Univ.) ;
  • Kim, Jung Hyun (Department of Mechatronics Engineering, Kyung Sung Univ.)
  • 정호제 (경성대학교 메카트로닉스공학과) ;
  • 김정현 (경성대학교 메카트로닉스공학과)
  • Received : 2013.11.26
  • Accepted : 2014.02.20
  • Published : 2014.03.01

Abstract

This paper presents the design, optimization and fabrication of a piezo driven micro-positioning stage constructed using a 3D-printer. 3D printing technology provides many advantageous aspects in comparison to traditional manufacturing techniques allowing more rapid prototyping freedom in design, etc. Micro-positioning stages have traditionally been made using metal materials namely aluminum. This paper investigates the possibility of fabricating stages using ABS material with a 3D printer. CAE simulations show that equivalent motion amplification can be achieved compared to a traditional aluminum fabricated stage while the maximum stress is 30 times less. This leads to the possibility of stages with higher magnification factors and less load on the driving piezo element. Experiment results agree with the simulation results. A micro-position stage was fabricated using a 3D printer with ABS material. The motion amplification is very linear and 50 nm stepping was demonstrated.

Keywords

References

  1. Kang, B. H., Wen, J. T. Y., Dagalakis, N. G., and Gorman, J. J., "Analysis and Design of Parallel Mechanisms With Flexure Joints," IEEE Transactions On Robotics, Vol. 21, No. 6, pp. 1179-1185, 2005. https://doi.org/10.1109/TRO.2005.855989
  2. Choi, S. B., Han, S. S., and Lee, Y. S., "Fine Motion Control of a Moving Stage using a Piezoactuator Associated with a Displacement Amplifier," Smart Mater. Struct., Vol. 14, No. 1, pp. 222-230, 2005. https://doi.org/10.1088/0964-1726/14/1/022
  3. Chu, C. L. and Fan, S. H., "A Novel Long-Travel Piezoelectric-Driven Linear Nanopositioning Stage," Precision Engineering, Vol. 30, No. 1, pp. 85-95, 2006. https://doi.org/10.1016/j.precisioneng.2005.05.002
  4. Gao, P., Swei, S. M., and Yuan, Z., "A New Piezodriven Precision Micropositioning Stage utilizing Flexure Hinges," Nanotechnology, Vol. 10, No. 4, pp.394-398, 1999. https://doi.org/10.1088/0957-4484/10/4/306
  5. Lu, T. F., Handley, D. C., Yong, Y. K., and Eales, C., "A Three-DOF Compliant Micromotion Stage with Flexure Hinges," Ind. Robot, Vol. 31, No 4, pp. 355-361, 2004. https://doi.org/10.1108/01439910410541873
  6. Hu, K., Kim, J. H., Schmiedeler, J., and Menq, C. H., "Design, Implementation, and Control of a Six-Axis Compliant Stage," Rev. Sci. Instrum., Vol. 79, Paper No. 025105, 2008. https://doi.org/10.1063/1.2841804
  7. Kwak, K. H. and Park, S. W., "Global 3D Printer Industry Technology Trends Analysis," J. of the KSME, Vol. 53, No. 10, pp. 58-64, 2013.
  8. Rho, J. H., Jeng, S. K., Kwak, M. H., and. Lee, D. H., "Rapid Prototyping with Vehicle Modeling Function and 3D Printer," Proc. of KSAE Annual Conference, pp. 2541-2544, 2009.
  9. Kim, H. C., Lee, S., and Lee, S. H., "Rapid Tooling Technology for Producing Functional Prototypes using Ceramic Shell Investment Casting and Patterns Produced Directly from ThermoJet 3D printer," J. Korean Soc. Precis. Eng., Vol. 23, No. 8, pp. 203-210, 2006.
  10. Jung, H. J. and Kim, J. H., "Development of Novel Piezo - driven Flexure Stage," Proc. of KSPE Spring Conference, Paper No. 13S533, 2013.
  11. Chang, S. H. and Du, B. C., "A Precision Piezodriven Micropositioner Mechanism with Large Travel Range," Rev. Sci. Instrum., Vol. 69, No. 4, pp. 1785-1791, 1998. https://doi.org/10.1063/1.1148842
  12. Jea, W. S., "Study on the Displacement Magnification Mechanism of Ultraprecision stage Using Linear Lever," M.Sc. Thesis, Dept. of Mechanical Engineering, Dong Eui Univ. 2008.

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