DOI QR코드

DOI QR Code

Development and Evaluation of Stitching Algorithm With five Degrees of Freedom for Three-dimensional High-precision Texture of Large Surface

대면적/고정밀 3차원 표면형상의 5자유도 정합법 개발 및 평가

  • Lee, Dong-Hyeok (Department of Mechanical Design And Mechatronics, Hanyang Univ.) ;
  • Ahn, Jung-Hwa (Manufacturing and Measuring Research Department, Hyundai Maritime Research Institute) ;
  • Cho, Nham Gyoo (Department of Mechanical Engineering, Hanyang Univ.)
  • Received : 2013.07.02
  • Accepted : 2014.03.26
  • Published : 2014.04.15

Abstract

In this paper, a new method is proposed for the five-degree-of-freedom precision alignment and stitching of three-dimensional surface-profile data sets. The control parameters for correcting thealignment error are calculated from the surface profile data for overlapped areas among the adjacent measuring areas by using the "least squares method" and "maximum lag position of cross correlation function." To ensure the alignment and stitching reliability, the relationships betweenthe alignment uncertainty, overlapped area, and signal-to-noise level of the measured profile data are investigated. Based on the results of this uncertainty analysis, an appropriate size is proposed for the overlapped area according to the specimen's surface texture and noise level.

Keywords

References

  1. Kim, C. J., Wyant, J., 1981, Subaperture test of a large flat or a fast aspheric surface, J. Opt. Soc. America 71 1587.
  2. Thunen, J. G., Kwon, O. Y., 1982, Full aperture testing with subaperture test optics, Proc. SPIE 351:1 19-27.
  3. Chow, W. W., Lawrence, G. N., 1983, Method for subaperture testing interferogram reduction, Optics letters 8:9 468-470. https://doi.org/10.1364/OL.8.000468
  4. Stuhlinger, T. W., 1986, Subaperture optical testing: experimental verification. In 1986 International Symposium/Innsbruck (International Society for Optics and Photonics), 350-359.
  5. Lee, D. H., Cho, N. G., 2012, Assessment of surface profile data acquired by a stylus profilometer, Measurement Science and Technology 23:10 5601.
  6. Lee, D. H., 2013, 3-Dimensional profile distortion measured by stylus type surface profilometer, Measurement 46:1 803-814. https://doi.org/10.1016/j.measurement.2012.09.022
  7. Ahn, J. H., Lee, D. H., 2012, The comparison of stitching technology that use feature extract and least squares fitting, Proc. KSMTE spring conference 2012 132.
  8. Ahn, J. H., Lee, D. H., Kim, M. G., Baek, S. Y., Cho, N. G., 2012, Evaluation of 5 degrees of freedom stitching algorithm for high precision large surface texture, Proc. KSPE autumn conference 2012 2 631-632.
  9. Lee, D. H., Cho, N. G., 2012, The 3 d.o.f stitching method of 3 dimensional measured data for high precision and large measuring area, Proc. KSMTE spring conference 2012 254.
  10. Lee, D. H., Cho, N. G., 2012 Five degree of freedom stitching method and system of three dimensional profile data, KR patent: 10-2012-0077762.
  11. Lee, D. H., Cho, N. G., 2012, The 5-d.o.f. Stitching Method of Micro-surface Data for High Spatial Resolution, Proc. KSMTE spring conference 2012 254.
  12. Bray, M., 1997, Stitching interferometer for large plano optics using a standard interferometer, Optical Science, Engineering and Instrumentation '97, International Society for Optics and Photonics 39-50.
  13. Bray, M., 2004, Stitching interferometry: recent results and absolute calibration, In Optical Systems Design, International Society for Optics and Photonics 305-313.
  14. Yu, Y., Chen, M., 2002, Correlative stitching interferometer and its key techniques, International Symposium on Optical Science and Technology, International Society for Optics and Photonics 382-393.
  15. Lee, D. H., Cho, N. G., 2012, Spatial synchronized Algorithm for Lateral Resolution Differences Between Multi-Datasets, Proc. KSPE autumn conference 2012, 685-686.
  16. Lee, D. H., Ahn, J. H., Cho, N. G.,, 2011, Development of Optical Surface Profiler Sensor Fusion Algorithm, Proc. KSPE autumn conference 2011, 641-642.
  17. Otsubo, M., Okada, K., 1992, Measurement of large plane surface shape with interferometric aperture synthesis, International Symposium on Optical Fabrication, Testing, and Surface Evaluation, International Society for Optics and Photonics 444-447.
  18. Otsubo, M., Okada, K., 1994 Measurement of large plane surface shapes by connecting small-aperture interferograms, Optical Engineering 33:2 608-613. https://doi.org/10.1117/12.152248
  19. Burge, J., Su, P., 2008, Optical metrology for very large convex aspheres, SPIE Astronomical Telescopes+ Instrumentation, International Society for Optics and Photonics 701818-701818-12.
  20. Xu, Z., Li, S., 2009, Three-dimensional profile stitching based on the fiducial markers for microfluidic devices, Optics Communications 282:4 493-499. https://doi.org/10.1016/j.optcom.2008.10.042
  21. Schmit, J., Wyant, J. C., 1998, Large field of view, high spatial resolution, surface measurements, International Journal of Machine Tools and Manufacture 38:5 691-698. https://doi.org/10.1016/S0890-6955(97)00119-3
  22. Ahn, J. H., 2013, A precision stitching method of 3-dimensional surface profile data, Master Thesis, Hanyang university, Republic of Korea.

Cited by

  1. 6 DOF 정합을 이용한 대 영역 실리콘 웨이퍼의 3차원 형상, 두께 측정 연구 vol.34, pp.2, 2014, https://doi.org/10.7736/kspe.2017.34.2.107