Journal of the Korean Society for Precision Engineering (한국정밀공학회지)

Korean Society for Precision Engineering (한국정밀공학회)
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Accuracy Improvement and Systematic Bias Analysis of Scanning White Light Interferometry for Free-form Surfaces Measurements

자유 곡면 형상 측정을 위한 백색광 주사 간섭계의 정확도 향상 및 시스템 오차 분석

  • Ghim, Young-Sik (Center for Space Optics, Korea Research Institute of Standards and Science) ;
  • Davies, Angela (Department of Physics and Optical Science, University of North Carolina at Charlotte) ;
  • Rhee, Hyug-Gyo (Center for Space Optics, Korea Research Institute of Standards and Science)
  • 김영식 (한국표준과학연구원 우주광학센터) ;
  • ;
  • 이혁교 (한국표준과학연구원 우주광학센터)
  • Received : 2014.01.20
  • Accepted : 2014.05.08
  • Published : 2014.07.01
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Abstract

Scanning white-light interferometry is an important measurement option for many surfaces. However, serious profile measurement errors can be present when measuring free-form surfaces being highly curved or tilted. When the object surface slope is not zero, the object and reference rays are no longer common path and optical aberrations impact the measurement. Aberrations mainly occur at the beam splitter in the interference objective and from misalignment in the optical system. Both effects distort the white-light interference signal when the surface slope is not zero. In this paper, we describe a modified version of white-light interferometry for eliminating these measurement errors and improving the accuracy of white-light interferometry. Moreover, we report systematic errors that are caused by optical aberrations when the object is not flat, and compare our proposed method with the conventional processing algorithm using the random ball test.

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References

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