Journal of Powder Materials (한국분말재료학회지)

The Korean Powder Metallurgy & Materials Institute (한국분말재료학회 (*구 분말야금학회))
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CNT Growth Behavior on Ti Substrate by Catalytic CVD Process with Temperature Gradient in Tube Furnace

촉매 화학기상증착 공정에서 온도구배 설정을 통한 타이타늄 기판에서의 CNT 성장 거동

  • Park, Ju Hyuk (Department of Materials Science and Engineering, Hanyang University) ;
  • Byun, Jong Min (Department of Materials Science and Engineering, Hanyang University) ;
  • Kim, Hyung Soo (Department of Materials Science and Engineering, Hanyang University) ;
  • Suk, Myung-Jin (Department of Materials and Metallurgical Engineering, Kangwon National University) ;
  • Oh, Sung-Tag (Department of Meterials Science and Engineering, Seoul National University of Science and Technology) ;
  • Kim, Young Do (Department of Materials Science and Engineering, Hanyang University)
  • Received : 2014.10.02
  • Accepted : 2014.10.21
  • Published : 2014.10.28
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Abstract

In this study, modified catalytic chemical vapor deposition (CCVD) method was applied to control the CNTs (carbon nanotubes) growth. Since titanium (Ti) substrate and iron (Fe) catalysts react one another and form a new phase ($Fe_2TiO_5$) above $700^{\circ}C$, the decrease of CNT yield above $800^{\circ}C$ where methane gas decomposes is inevitable under common CCVD method. Therefore, we synthesized CNTs on the Ti substrate by dividing the tube furnace into two sections (left and right) and heating them to different temperatures each. The reactant gas flew through from the end of the right tube furnace while the Ti substrate was placed in the center of the left tube furnace. When the CNT growth temperature was set $700/950^{\circ}C$ (left/right), CNTs with high yield were observed. Also, by examining the micro-structure of CNTs of $700/950^{\circ}C$, it was confirmed that CNTs show the bamboo-like structure.

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