Korean Journal of Optics and Photonics (한국광학회지)

Optical Society of Korea (한국광학회)
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Ellipsometric Expressions for Two Uniaxially Anisotropic Layers Coated on a Multilayered Substrate

두개의 단축이방성 박막이 있는 다층박막 시료의 타원식

  • Received : 2015.03.06
  • Accepted : 2015.03.25
  • Published : 2015.04.25
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Abstract

Explicit expressions are derived for the effective reflection coefficients of obliquely incident light on a multilayered substrate coated with two uniaxially anisotropic films. Based on these reflection coefficients, ellipsometric constants are obtained as function of the tilt and azimuthal angles of the optical axes of the uniaxial films. Explicit expressions are provided, which can be used to separate the effects of surface anisotropy for anisotropic film from that of its bulk anisotropy, so that these expressions may be utilized in characterizing the surface anisotropy of alignment layers.

광축의 각도가 서로 다른 두 단축이방성 박막이 다층박막 기층시료 위에 코팅되어 있을 때 비스듬히 입사한 빛의 유효반사계수 표현들을 유도하였다. 유효반사계수로부터 타원상수 표현들을 구하고 이 타원상수의 단축이방성 박막 광축각도 의존성으로부터 단축이방성 박막의 표면 이방성에 의한 효과와 주층 이방성에 의한 효과를 구분하여 해석할 수 있도록 하였다.

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References

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Cited by

  1. Precise Measurement of the Ultrasmall Optical Anisotropy of Rubbed Polyimide Using an Improved Reflection Ellipsometer vol.26, pp.4, 2015, https://doi.org/10.3807/KJOP.2015.26.4.195
  2. The Explicitly Quasi-linear Relation Between the Order Parameter and Normalized Birefringence of Aligned Uniaxially Anisotropic Molecules Determined Using a Numerical Method vol.27, pp.6, 2016, https://doi.org/10.3807/KJOP.2016.27.6.223
  3. Ellipsometric Expressions for a Sample Coated with Uniaxially Anisotropic Layers vol.26, pp.5, 2015, https://doi.org/10.3807/KJOP.2015.26.5.275