Journal of the Korean Society of Manufacturing Process Engineers (한국기계가공학회지)

The Korean Society of Manufacturing Process Engineers (한국기계가공학회)
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Manufacturing of Micromolds for Plastic Molding Technologies via Synchrotron LIGA Process

방사광 LIGA 공정을 이용한 플라스틱 성형용 마이크로 금형 제작

  • Lee, Bong-Kee (School of Mechanical Engineering, Chonnam National University) ;
  • Kim, Jong-Hyun (Pohang Accelerator Laboratory, Pohang University of Science and Technology)
  • 이봉기 (전남대학교 기계공학부) ;
  • 김종현 (포항공과대학교 포항가속기연구소)
  • Received : 2015.08.04
  • Accepted : 2015.08.05
  • Published : 2015.08.31
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Abstract

In the present study, copper micromolds with a microhole array were precisely manufactured by a synchrotron LIGA process. Like in the traditional LIGA process, a deep X-ray lithography based on a synchrotron radiation was employed as the first manufacturing step. Due to the excellent optical performance of the synchrotron X-ray used, cylindrical micropillar arrays with high aspect ratio could be efficiently obtained. The fabricated microfeatures were then used as a master of the subsequent copper electroforming process, thereby resulting in copper micromolds with a microhole array. Thermoplastic hot embossing experiments with the copper micromolds were carried out for imprinting cylindrical microfeatures onto a polystyrene sheet. Through the hot embossing, the effect of embossing temperature and usefulness of the present manufacturing method could be verified.

Keywords

References

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