Journal of the Semiconductor & Display Technology (반도체디스플레이기술학회지)

The Korean Society Of Semiconductor & Display Technology (한국반도체디스플레이기술학회)
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The Communication Protocol Model for Semiconductor Equipment with Internet of Things

사물인터넷을 이용한 반도체 장비 통신 프로토콜 모델

  • Kim, Doo Yong (Dept. of Electronic Engineering, Soonchunhyang University) ;
  • Kim, Kiwan (Dept. of Electrical and Electronic Engineering, Chungnam State University)
  • 김두용 (순천향대학교 전자공학과) ;
  • 김기완 (충남도립대 전기전자공학과)
  • Received : 2019.11.21
  • Accepted : 2019.12.12
  • Published : 2019.12.31
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Abstract

The smart factory has developed with the help of several technologies such as automation, artificial intelligence, big data, smart sensors and communication protocols. The Internet of things(IOT) among communication protocols has become the key factor for the seamless integration of various manufacturing equipment. Therefore, it is important that the IOT cooperate with the standards of communication protocols proposed by the SEMI in the semiconductor industry. In this paper, we suggest a novel reference model of the communication protocols for semiconductor equipment by introducing an IOT service layer. With the IOT service layer, we can use the functions and the additional services provided by the IOT standards that give the inter-operability between factory machines and host computers. We implement the standard of the communication protocols for semiconductor equipment with the IOT service layer by using ns3 simulator. It concludes that it is necessary to provide the platform for the IOT service layer to deploy efficiently the proposed reference model of the communication protocols.

Keywords

References

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