Journal of Korean Society for Quality Management (품질경영학회지)

Korean Society for Quality Management (한국품질경영학회)
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Improving the Yield of Semiconductor Manufacturing Processes using Clustering Analysis and Response Surface Method

군집분석 및 반응표면분석법을 활용한 반도체 공정 수율향상에 관한 연구

  • Koh, Kwan Ju (Department of Industrial and Management Engineering, Kyonggi University Graduate School) ;
  • Kim, Na Yeon (Department of Industrial and Management Engineering, Kyonggi University Graduate School) ;
  • Kim, Yong Soo (Department of Industrial and Management Engineering, Kyonggi University)
  • 고관주 (경기대학교 일반대학원 산업경영공학과) ;
  • 김나연 (경기대학교 일반대학원 산업경영공학과) ;
  • 김용수 (경기대학교 산업경영공학과)
  • Received : 2019.06.04
  • Accepted : 2019.06.10
  • Published : 2019.06.30
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Abstract

Purpose: This study aims to conduct a systematic literature review to suitably identify wide and specific issues and topics on service quality in supply chain. Methods: This study is to investigate service quality in supply chain research using a systematic literature review methodology. In order to extract influential journals and papers, we used the SJR impact factor provided by the SCOPUS database. The collected 169 papers were analyzed using bibliometric analysis, citation analysis as well as keywords network. Results: We conducted a bibliometric analysis to identify top authors contributing to service quality in supply chain and their issues, and further examined important keywords and new emerging keywords. In addition, we extracted five influential papers by PageRank to clarify critical issues and divided into five clusters to identify topics of service quality in supply chain by using network-based approach. In order to examine comprehensive issues and topics of service quality in supply chain, we constructed a keyword network to observe difference in the classification of important keywords across network centrality measures. Conclusion: Our study reviewed literature on service quality in supply chain and explored the future directions and trends of service quality in supply chain.

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References

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