Journal of the Korean Institute of Gas (한국가스학회지)

The Korean Institute of GAS (한국가스학회)
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A study on the Internal Flow Analysis of Gas Cylinder Cabinet for Specialty Gas of Semiconductor

반도체용 특수가스 공급을 위한 가스캐비닛 내부 유동해석에 관한 연구

  • Kim, Jung-Duck (Dept. of Safety Engineering, Korea National University of Trans.) ;
  • Han, Seung-A (Environment & Safety Center, Samsung Electronic DS.) ;
  • Yang, Won-Baek (Dept. of Industrial Safety Engineering, Soongsil Cyber Univ.) ;
  • Rhim, Jong-Guk (Dept. of Safety Engineering, Korea National University of Trans.)
  • 김정덕 (한국교통대학교 안전공학과) ;
  • 한승아 (삼성전자(주) 환경안전센터) ;
  • 양원백 (숭실사이버대학교 안전공학과) ;
  • 임종국 (한국교통대학교 안전공학과)
  • Received : 2020.09.16
  • Accepted : 2020.10.27
  • Published : 2020.10.31
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Abstract

In general, when manufacturing a semiconductor, a number of hazardous and dangerous substances such as flammability, toxic, and corrosiveness are used. In particular, semiconductors are manufactured using specialty gas in processes such as CVD and etching. The specialty gas is filled in a container in the state of compressed or liquefied gas, and a gas cylinder cabinet is used as a facility for supplying this specialty gas to the semiconductor manufacturing process. When a accident occurs in the gas supply system, gas is released through a pressure release device installed in the gas cylinder to secure the safety of the supply system. In this case, the gas released inside the gas cabinet, there is a risk of leaking to the outside. After that, by analyzing the gas flow in the gas cabinet, it is intended to identify the risk associated with leak and to provide measures to prevent accidents.

일반적으로 반도체를 제조할 때는 인화성, 독성, 부식성의 유해·위험물질이 다수 사용되며, 특히 화학적 증착(CVD), 식각(Etch) 등의 공정에서는 특수가스를 사용하여 반도체를 제조하고 있다. 특수가스는 압축 또는 액화가스의 상태로 용기에 충전되어 있는데, 특수가스를 반도체 제조공정에 공급하는 설비로서 가스캐비닛(Gas Cylinder Cabinet)이 사용되고 있다. 이러한 가스공급시스템 내에서 실린더 이상 발생 시 배관·계측기 등 공급시스템의 안전 확보를 위해 가스실린더에 설치된 압력방출장치를 통해 가스가 방출하게 되는데, 이 경우 가스캐비닛 내부에 방출되는 가스가 캐비닛 외부로 누출될 위험성이 존재한다. 따라서 가스캐비닛 내부의 유체유동을 분석하여 누출에 따른 위험성을 파악하고 이에 대한 위험도 감소를 위한 대책을 제시하고자 한다.

Keywords

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