Journal of the Korean Society for Precision Engineering (한국정밀공학회지)

Korean Society for Precision Engineering (한국정밀공학회)
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Optical Waveguide Fabrication using Laser Direct Writing Method

레이저 직접묘화방법을 이용한 광도파로 제작

  • 김정민 (한국기계연구원 지능형정밀기계연구부) ;
  • 신보성 (부산대학교 ERC/NSDM) ;
  • 김재구 (한국기계연구원 지능형정밀기계연구부) ;
  • 장원석 (한국기계연구원 지능형정밀기계연구부)
  • Published : 2003.12.01
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Abstract

The laser direct writing method has some advantages of being maskless, allowing rapid and inexpensive prototyping in comparison to conventional mask-based photolithography. In general, there are two kinds of laser direct writing methods such as the laser ablation method and the laser polymerization method. The laser polymerization method was studied fur manufacturing waveguide in this paper. It is important to reduce line width for image mode waveguides, so some investigations will be carried out in various conditions of process parameters such as laser power, writing speed, focusing height and optical properties of polymer. Experimentally, the optical waveguide was manufactured trapezoid shape. Through SEM the waveguide was 20 ${\mu}{\textrm}{m}$ width and 7.4 ${\mu}{\textrm}{m}$ height.

Keywords

References

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