Transactions on Electrical and Electronic Materials

The Korean Institute of Electrical and Electronic Material Engineers (한국전기전자재료학회)
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Analysis of ITO on Polymer Substrate by External Bending Force

  • Han, Jin-Woo (Department of Electrical & Electronic Engineering, Yonsei University) ;
  • Kim, Young-Hwan (Department of Electrical & Electronic Engineering, Yonsei University) ;
  • Kim, Jong-Hwan (Department of Electrical & Electronic Engineering, Yonsei University) ;
  • Hwang, Jeoung-Yeon (Department of Electrical & Electronic Engineering, Yonsei University) ;
  • Seo, Dae-Shik (Department of Electrical & Electronic Engineering, Yonsei University)
  • Published : 2005.08.01
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Abstract

In this paper, we investigated the island density-dependent stress distribution of indium-tin-oxide (ITO) film on polycarbonate substrate by external bending force. We used e-beam and RF­sputter for SiON, ITO sputtering. It was found that there are influence of island density on the substrate and decreasing crack density as goes to the minimum density. From the result that crack density was increasing at maximum island density, it is evident that more stress is imposed on same island position as island density.

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References

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  1. Bending Effects of ITO Thin Film Deposited on the Polymer Substrate vol.21, pp.7, 2008, https://doi.org/10.4313/JKEM.2008.21.7.669