Journal of the Korean Physical Society

Korean Physical Society (한국물리학회)
권호 표지

The Effect of Heat Treatment on the Morphological and Electrical Properties of Aluminum-Doped Zinc-Oxide Films

Lim, D.G.;Kang, G.S.;Kwon, S.I.;Yi, J.H.;Park, M.W.;Kwak, D.J.

  • Published : 20070900
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Abstract

In this paper, we report an investigation into the effect of heat treatment on the morphological and electrical properties of aluminum-doped zinc-oxide (ZnO:Al) films. ZnO:Al films were deposited on glass substrates by DC magnetron sputtering from a ZnO target mixed with 2 wt\% Al$_2$O$_3$. We carried out heat treatments in argon and oxygen atmospheres at 100 $\sim$ 400 $^\circ$C for 60 min. As the annealing temperature was increased, the film showed a looser structure, smaller grain size, and rougher surface. On increasing the annealing temperature, the film resistivity was increased due to a decrease in the carrier concentration. The electrical resistivity increased by 34 \% with increasing annealing temperature up to 400 $^\circ$C.

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