Journal of Korea Society of Waste Management (한국폐기물자원순환학회지)

Korea Society of Waste Management (한국폐기물자원순환학회)
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A Study on Decomposition and By-products of PFCs using Electron-beam

전자빔을 이용한 PFCs 분해 및 부산물 생성에 관한 연구

  • Ryu, Jae-Yong (Urban & Environmental Engineering, Kyungnam University) ;
  • Son, Young-Il (Korea Environmental Industry & Technology Institute (KEITI)) ;
  • Jang, Seong-Ho (Department of Bio-Environment and Energy, Pusan National University)
  • 류재용 (경남대학교 도시환경공학과) ;
  • 손영일 (한국환경산업기술원) ;
  • 장성호 (부산대학교 바이오환경에너지학과)
  • Received : 2014.09.25
  • Accepted : 2014.10.30
  • Published : 2015.01.31
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Abstract

Nitrogen trifluoride ($NF_3$) and Sulfur hexafluoride ($SF_6$) are usually used as novel etching and cleaning gases in semiconductor industry and electrical equipments. Recently, the many studies about PFCs decomposition have been performed due to high global warming potential (GWP). This study is to identify the effects of the hydrogen on the destruction and removal efficiency (DRE) of $NF_3$ and $SF_6$ when using the electron-beam. The experiment was conducted at a flow rate of 10 LPM with $NF_3$ and $SF_6$ of 1,000 ppm. Absorbed dose (electric current) was 1,028 kGy (5 mA). The DREs of $NF_3$ and $SF_6$ gases increased about 54% and 68% respectively with hydrogen injection. By-products formed by $NF_3$ and $SF_6$ destruction were mainly HF and $F_2$ gases. In addition, the particles were generated during the $NF_3$ and $SF_6$ destruction due to corrosion of reactor and $SF_6$ decomposion, respectively.

Keywords

References

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