Deep Etching of Copper Thin Film Using High-density Plasma of Hydrocarbon/Alcohol Gases
| No | 이름 | 이메일 | 기관 |
|---|---|---|---|
| 1 | Su Myung Ha | - | Department of Chemical Engineering, Inha University |
| 2 | Yoon Jae Cho | - | Department of Chemical Engineering, Inha University |
| 3 | Soo Young Yoon | - | Research and Development Center, LG Display Co |
| 4 | Jong Uk Bae | - | Research and Development Center, LG Display Co |
| 5 | Jung Ho Bang | - | Research and Development Center, LG Display Co |
| 6 | Jun Su Lee | - | Research and Development Center, LG Display Co |
| 7 | Chee Won Chung | - | Department of Chemical Engineering, Inha University |